Radial profile of the electron energy distribution function in RF capacitive gas-discharge plasma
Abstract
This paper reports experimental results on low-pressure argon capacitive RF discharge (parallel-plate capacitively-coupled plasma - CCP) under different conditions, namely, gas pressure in the range 3 -r- 30 Pa and RF power in the range 10 - 100 W. The IV characteristics measured were processed by two different second-derivative probe techniques for determination of the plasma parameters and the electron energy distribution function. The radial profiles of the main plasma parameters are presented.
- Publication:
-
Journal of Physics Conference Series
- Pub Date:
- March 2016
- DOI:
- 10.1088/1742-6596/700/1/012007
- Bibcode:
- 2016JPhCS.700a2007D