Engineering Strain in Silicon Using SIMOX 3-D Sculpting Wen, Huashun ; Borlaug, David ; Wang, Hongxiang ; Ji, Yuefeng ; Jalali, Bahram Abstract Publication: IEEE Photonics Journal Pub Date: April 2016 DOI: 10.1109/JPHOT.2016.2535909 Bibcode: 2016IPhoJ...835909W