Fabrication of Etched Facets and Vertical Couplers in InP for Packaging and On-Wafer Test
Abstract
- Publication:
-
IEEE Photonics Technology Letters
- Pub Date:
- February 2016
- DOI:
- 10.1109/LPT.2015.2493583
- Bibcode:
- 2016IPTL...28..245S