17×17並列電子源駆動システムの開発; 17×17並列電子源駆動システムの開発; Development of a 17×17 Parallel Electron Beam Lithography System
Abstract
- Publication:
-
IEEJ Transactions on Sensors and Micromachines
- Pub Date:
- 2016
- DOI:
- 10.1541/ieejsmas.136.413
- Bibcode:
- 2016IJTSM.136..413M