Chemical modification of B4C cap layers on Pd/B4C multilayers
Abstract
Chemical modifications of B4C cap layers on sputtered Pd/B4C multilayer coatings for X-ray optical applications were investigated using X-ray reflectivity, photoemission electron spectroscopy, photoemission electron microscopy, transmission electron microscopy, energy dispersive X-ray spectroscopy, and infrared spectroscopy. The results indicate oxidation down to probing depths of about 10 nm and strong evidence for the formation of B2O3 crystals at the sample surface, while B4C like compounds are absent.
- Publication:
-
Applied Surface Science
- Pub Date:
- March 2016
- DOI:
- 10.1016/j.apsusc.2016.01.180
- Bibcode:
- 2016ApSS..367..347S
- Keywords:
-
- X-ray multilayers;
- Multilayer degradation;
- Protection layers
