Buckled diamond-like carbon nanomechanical resonators
Abstract
We have developed capacitively-transduced nanomechanical resonators using sp2-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of 500 °C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-controlled oscillators.We have developed capacitively-transduced nanomechanical resonators using sp2-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of 500 °C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-controlled oscillators.
Electronic supplementary information (ESI) available: Detailed transmission measurements, discussion about mechanical contacts and surface roughness, derivation of the equations describing the eigenspectrum of a buckled beam under electrostatic load. See DOI: 10.1039/c5nr02820e- Publication:
-
Nanoscale
- Pub Date:
- August 2015
- DOI:
- 10.1039/c5nr02820e
- arXiv:
- arXiv:1510.09147
- Bibcode:
- 2015Nanos...714747T
- Keywords:
-
- Condensed Matter - Mesoscale and Nanoscale Physics
- E-Print:
- 5 + 4 pages, 3 + 4 figures