On the Calculation of SEM and FIB Beam Profiles Kološová, Jolana ; Hrnčíř, Tomáš ; Jiruše, Jaroslav ; Rudolf, Miroslav ; Zlámal, Jakub Abstract Publication: Microscopy and Microanalysis Pub Date: June 2015 DOI: 10.1017/S1431927615013380 Bibcode: 2015MiMic..21S.206K