Improved work function of preferentially oriented indium oxide films induced by the plasma exposure technique
Abstract
The preferentially oriented In2O3 thin films were prepared on glass substrates by conventional magnetron sputtering with Ar+ plasma exposure at room temperature. Based on the x-ray diffraction, x-ray photoelectron spectroscopy, and UV photoelectron spectroscopy results, it was found that the Ar+ plasma exposure not only enhanced the low-temperature crystallization of In2O3 thin films, but also led to a dramatic improvement in the work function. Furthermore, it demonstrated that the shift mechanism of the work function in In2O3 thin films mainly combined with theelimination of oxygen defects and the change of the preferential orientation of In2O3 film surface.
- Publication:
-
Electronic Materials Letters
- Pub Date:
- November 2015
- DOI:
- 10.1007/s13391-015-4342-4
- Bibcode:
- 2015EML....11..938Y
- Keywords:
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- indium oxide;
- thin films;
- plasma exposure;
- work function