圧力-吸着状態密度変換式による水排気曲線の解析; 圧力-吸着状態密度変換式による水排気曲線の解析; Analysis of a Pumping Curve of Water with the Conversion Equation from Pressure to Adsorption Density of States
Abstract
- Publication:
-
Journal of the Vacuum Society of Japan
- Pub Date:
- 2013
- DOI:
- 10.3131/jvsj2.56.457
- Bibcode:
- 2013JVSJ...56..457T