Microdetermination of titanium on the developed silicon surface using cells made of perfluorinated proton-conducting membranes
Abstract
A technique for microdetermination of titanium on the developed silicon surface is suggested. In this technique, thin titanium layers are dissolved in an aqueous solution of hydrofluoric acid and then the resulting solutions are analyzed using potentiometric cells made of perfluorinated proton-conducting membranes. The feasibility of estimation of titanium on the silicon surface in amounts of 5 × 10‑7 mol or less is demonstrated.
- Publication:
-
Journal of Technical Physics
- Pub Date:
- May 2013
- DOI:
- 10.1134/S1063784213050149
- Bibcode:
- 2013JTePh..58..766N
- Keywords:
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- Titanium;
- Silicon Surface;
- Hydrofluoric Acid;
- Membrane Electrode Assembly;
- Cleavage Surface