Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD Potts, Stephen Ernest ; Profijt, Harald Benjamin ; Roelofs, Robin ; Kessels, W. M. M. Abstract Publication: ECS Transactions Pub Date: March 2013 DOI: 10.1149/05013.0093ecst Bibcode: 2013ECSTr..50m..93P