Investigations on Bond Strength Development of Plasma Activated Direct Wafer Bonding with Annealing Plach, Thomas ; Hingerl, Kurt ; Stifter, D. ; Dragoi, Viorel ; Wimplinger, Markus Abstract Publication: ECS Transactions Pub Date: March 2013 DOI: 10.1149/05007.0277ecst Bibcode: 2013ECSTr..50g.277P