MEMS packaging for reliable resonators and oscillators Kim, B. ; Melamud, R. ; Candler, R. A. ; Hopcroft, M. A. ; Kenny, T. W. Abstract Publication: IEEE MTT-S International Microwave Symposium Digest Pub Date: June 2012 DOI: 10.1109/MWSYM.2012.6259391 Bibcode: 2012imsd.conf59391K