Pulsed laser deposition of ITO thin films and their characteristics Zuev, D. A. ; Lotin, A. A. ; Novodvorsky, O. A. ; Lebedev, F. V. ; Khramova, O. D. ; Petuhov, I. A. ; Putilin, Ph. N. ; Shatohin, A. N. ; Rumyanzeva, M. N. ; Gaskov, A. M. Abstract Publication: Semiconductors Pub Date: March 2012 DOI: 10.1134/S1063782612030256 Bibcode: 2012Semic..46..410Z