Focused Ion Beam Lithography of Nanophotonic Structures
Abstract
Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 - August 2, 2012.
- Publication:
-
Microscopy and Microanalysis
- Pub Date:
- July 2012
- DOI:
- 10.1017/S1431927612004916
- Bibcode:
- 2012MiMic..18S.612S