RF-MEMSスイッチのための低電圧駆動薄膜PZT積層アクチュエータ; RF-MEMSスイッチのための低電圧駆動薄膜PZT積層アクチュエータ; Low-Voltage-Driven Thin Film PZT Stacked Actuator for RF-MEMS Switches
Abstract
- Publication:
-
IEEJ Transactions on Sensors and Micromachines
- Pub Date:
- 2012
- DOI:
- 10.1541/ieejsmas.132.282
- Bibcode:
- 2012IJTSM.132..282M