The Nature and Characterization of Contaminant Particles
Abstract
Micro- and nano-particle contamination is becoming increasingly important to achieve and maintain high product yields. In order to employ appropriate material and product development strategies, or institute preventive assembly and remediation strategies to control particle contamination, it is essential to understand the nature of micro and nano particles and to characterize these particles. Particles in the size range 0.1 nm to 100 nm present unique challenges and opportunities for imaging and characterization. Many advances and new developments have been made in qualitative and quantitative characterization techniques for particles in this size range, including neutron holography, absorption tomography, three dimensional atom probe imaging, helium ion microscopy, ultrafast microscopy and crystallography, magnetic resonance force microscopy, and high-resolution imaging of non- crystalline structures. A brief review of the nature of small particles is presented and recent developments in selected characterization techniques are described.
- Publication:
-
A Safer Space for Safer World
- Pub Date:
- January 2012
- Bibcode:
- 2012ESASP.699E..92K