New DRIE-Patterned Electrets for Vibration Energy Harvesting
Abstract
This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret-based Vibration Energy Harvesters (e-VEH). This process consists in forming continuous layers of SiO2/Si3N4 electrets in order to limit surface conduction phenomena and is a new way to see the problem of electret patterning. Experimental results prove that patterned electrets charged by a positive corona discharge show excellent stability with high surface charge densities that may reach 5mC/m2 on 1.1μm-thick layers, even with fine patterning and harsh temperature conditions (up to 250°C). This paves the way to new e-VEH designs and manufacturing processes.
- Publication:
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European Physical Journal Web of Conferences
- Pub Date:
- October 2012
- DOI:
- 10.1051/epjconf/20123302010
- arXiv:
- arXiv:1205.2383
- Bibcode:
- 2012EPJWC..3302010B
- Keywords:
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- Condensed Matter - Materials Science
- E-Print:
- Proc. European Energy Conference, 2012