BEOL Solvent Clean Process Study Using Fluoride Containing and Hydroxylamine Based Stripper Luo, Victor ; Chang, Jason ; Shi, Kevin ; Zhan, Willim ; Zhang, Jason ; Peng, Libbert ; Zhang, David W. Abstract Publication: ECS Transactions Pub Date: March 2012 DOI: 10.1149/1.3694332 Bibcode: 2012ECSTr..44a.313L