Electro Mechanical Scanning Probe Lithography of Carbon Nanostructures

Carbon nano-processing as one of the most promising methods for creation of nanostructures and various types of electronic and optical systems is analyzed. A new method of electro-induced scanning probe lithography (SPL) based on the formation of ordered carbon nanostructures by combining electrical and mechanical actions on the original material in a scanning probe microscope (SPM) is proposed and tested.