Effect of Segmenting Powered Electrode on Plasma Uniformity in Large-Area Capacitively Coupled Plasma Discharge
Abstract
- Publication:
-
IEEE Transactions on Plasma Science
- Pub Date:
- November 2011
- DOI:
- 10.1109/TPS.2011.2157118
- Bibcode:
- 2011ITPS...39.2526C