Atomic Layer Deposition of AlN with Tris(Dimethylamido)Aluminum and NH3 Liu, Guo ; Deguns, Eric ; Lecordier, Laurent ; Sundaram, Ganesh ; Becker, Jill Abstract Publication: ECS Transactions Pub Date: October 2011 DOI: 10.1149/1.3633671 Bibcode: 2011ECSTr..41b.219L