Study to Transfer 0.11μm DRAM ArF Process to KrF Process in Litho Liu, Joe ; Yao, Eric ; Fan, Erics ; Chang, Kent ; Lv, Ted ; Zhang, Jeff ; Liang, Lee ; Hong, Jerry ; Li, Mars Abstract Publication: ECS Transactions Pub Date: March 2011 DOI: 10.1149/1.3567594 Bibcode: 2011ECSTr..34a.285L