Characteristics of line pulsed glow discharge plasma at atmospheric pressure for preparation of amorphous carbon films
Abstract
Diamond-like carbon (DLC) films have excellent physical and chemical properties for applications such as high mechanical hardness, low friction, chemical inertness, electrical insulation, optical transparency, and biological compatibility. For preparation of large-area amorphous carbon film, the line glow discharge plasma (LGDP) at atmospheric pressure was produced with a high-voltage, high-repetition bipolar pulse using the three-electrode configuration in our experiment. The DBD source plasma was generated by a high-voltage, high-repetition bipolar pulse with a fast rise time using the parallel-plate geometry with a gap width of 2 mm. Two quartz glasses were placed between two electrodes made of stainless-steel to produce DBD. A mixed gas of He as a carrier gas and CH4 as a precursor was supplied to the discharge region. Applying another pulsed bias voltage to the gap between the parallel plate electrode and the bias electrode (stainless-steel substrate), the LGDP was extracted on the substrate for a film deposition. When the pulsed bias voltage was applied to the substrate at several μs later, the largest intensity of LGDP was observed at the both polarity of bias voltage. We will show the detail characteristics of the LGDP.
- Publication:
-
APS Division of Plasma Physics Meeting Abstracts
- Pub Date:
- October 2011
- Bibcode:
- 2011APS..DPPPP9154F