Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations
Abstract
A method of low-angle mid-IR light scattering is shown to be applicable for the contactless and non-destructive inspection of the internal gettering process in CZ Si crystals. A classifcation of scattering inhomogeneities in initial crystals and crystals subjected to the getting process is presented.
- Publication:
-
arXiv e-prints
- Pub Date:
- August 2010
- DOI:
- arXiv:
- arXiv:1008.4534
- Bibcode:
- 2010arXiv1008.4534A
- Keywords:
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- Condensed Matter - Materials Science;
- Condensed Matter - Mesoscale and Nanoscale Physics;
- Physics - Optics
- E-Print:
- DRIP-VI