TEM characterization of ALD layers in deep trenches using a dedicated FIB lamellae preparation method Gluch, J. ; Rößler, T. ; Schmidt, D. ; Menzel, S. B. ; Albert, M. ; Eckert, J. Abstract Publication: Thin Solid Films Pub Date: June 2010 DOI: 10.1016/j.tsf.2009.12.029 Bibcode: 2010TSF...518.4553G