Stabilization and operation of porous silicon photonic structures from near-ultraviolet to near-infrared using high-pressure water vapor annealing
Abstract
- Publication:
-
Thin Solid Films
- Pub Date:
- April 2010
- DOI:
- 10.1016/j.tsf.2009.08.043
- Bibcode:
- 2010TSF...518.3276G