Electrical properties and structure of laser-spike-annealed hafnium oxide Kim, Dong Hak ; Park, Joon Won ; Chang, You Min ; Lim, D. ; Chung, Haeyang Abstract Publication: Thin Solid Films Pub Date: March 2010 DOI: 10.1016/j.tsf.2009.08.039 Bibcode: 2010TSF...518.2812K