Hydrogen implantation-induced large area exfoliation in AlN epitaxial layers Dadwal, U. ; Scholz, R. ; Kumar, P. ; Kanjilal, D. ; Christiansen, S. ; Gösele, U. ; Singh, R. Abstract Publication: Physica Status Solidi Applied Research Pub Date: January 2010 DOI: 10.1002/pssa.200982605 Bibcode: 2010PSSAR.207...29D