EUV lithography: Lithography gets extreme
Abstract
Extreme ultraviolet lithography extends photolithography to much shorter wavelengths and is a cost-effective method of producing more-advanced integrated circuits. Although some infrastructure challenges still remain, this technology is expected to begin high-volume microchip production within the next three years.
- Publication:
-
Nature Photonics
- Pub Date:
- January 2010
- DOI:
- 10.1038/nphoton.2009.251
- Bibcode:
- 2010NaPho...4...24W