Qualitative sims analysis of28,29,30Si isotope concentration in silicon using a Tof.Sims-5 Setup
Abstract
The possibility of quantitative SIMS determination of28-30Si isotope concentrations in silicon samples using a TOF.SIMS-5 spectrometer is shown. Th e isotope composition of a large number of Si samples, namely epitaxial Si layers with a natural isotope ratio, amorphous Si films depleted of28Si isotope (deposited on natural Si substrates), and samples enriched with 28Si isotope (manufactured by VITCON) is investigated. Substantial variations in the 29Si/30Si isotope ratio (from 1.51 for the natural content up to 25 in the case of limiting enrichment with 28Si isotope) are revealed.
- Publication:
-
Bulletin of the Russian Academy of Sciences, Physics
- Pub Date:
- January 2010
- DOI:
- 10.3103/S106287381001020X
- Bibcode:
- 2010BRASP..74...75D
- Keywords:
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- 28Si Concentration;
- Silicon Sample;
- Silicon Tetraflu Oride;
- Natural Content;
- Isotope Concentration