Deflectometry: 3D-Metrology from Nanometer to Meter Häusler, G. ; Knauer, M. C. ; Faber, C. ; Richter, C. ; Peterhänsel, S. ; Kranitzky, C. ; Veit, K. Abstract Publication: Fringe 2009 Pub Date: 2009 Bibcode: 2009frin.book..416H