EUV imaging experiment of an adaptive optics telescope

We report an experimental result of our normal-incident EUV telescope tuned to a 13.5 nm band, with an adaptive optics. The optics consists of a spherical primary mirror and a secondary mirror. Both are coated by Mo/Si multilayer. The diameter of the primary and the secondary mirrors are 80 mm and 55mm, respectively. The secondary mirror is a deformable mirror with 31 bimorph-piezo electrodes. The EUV from a laser plasma source was exposed to a Ni mesh with 31 micro-m wires. The image of this mesh was obtained by a backilluminated CCD. The reference wave was made by an optical laser source with 1 μm pin-hole. We measure the wave form of this reference wave and control the secondary mirror to get a good EUV image. Since the paths of EUV and the optical light for the reference were different from each other, we modify the target wave from to control the deformable mirror, as the EUV image is best. The higher order Zernike components of the target wave form, as well as the tilts and focus components, were added to the reference wave form made by simply calculated. We confirmed the validity of this control and performed a 2.1 arc-sec resolution.