Electrical insulation properties of sputter-deposited SiO2, Si3N4and Al2O3films at room temperature and 400 °C
Abstract
- Publication:
-
Physica Status Solidi Applied Research
- Pub Date:
- March 2009
- DOI:
- 10.1002/pssa.200880481
- Bibcode:
- 2009PSSAR.206..514B