Fabrication and characterization of nanoscale resonant gratings on thin silicon membrane Wang, Yongjin ; Kanamori, Yoshiaki ; Ye, Jiasheng ; Sameshima, Hidehisa ; Hane, Kazuhiro Abstract Publication: Optics Express Pub Date: March 2009 DOI: 10.1364/OE.17.004938 Bibcode: 2009OExpr..17.4938W