Pd/Ru/Au Ohmic contacts to InAlSb/InAs heterostructures for high electron mobility transistors
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- 2009
- DOI:
- 10.1116/1.3204983
- Bibcode:
- 2009JVSTB..27.2145D