Commercial molecular beam epitaxy production of high quality SrTiO[sub 3] on large diameter Si substrates
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- 2009
- DOI:
- 10.1116/1.3130165
- Bibcode:
- 2009JVSTB..27.1195G