Surface Reaction of TaN Metal Gate Etching by Using an Inductively Coupled Plasma Um, Doo-Seung ; Kim, Dong-Pyo ; Kim, Gwan-Ha ; Woo, Jong-Chang ; Kim, Chang-Il Abstract Publication: Journal of Korean Physical Society Pub Date: March 2009 DOI: 10.3938/jkps.54.1054 Bibcode: 2009JKPS...54.1054U