Ultra-Shallow Junction Formation by Plasma doping and Excimer Laser Annealing Jung, Lak-Myung ; Do, Seung-Woo ; Kim, Jae-Min ; Kong, Seong Ho ; Nam, Ki-Hong ; Lee, Yong-Hyun Abstract Publication: ECS Transactions Pub Date: May 2009 DOI: 10.1149/1.3118934 Bibcode: 2009ECSTr..19a..87J