Influence of Polymeric Gas on Sidewall Profile and Defect Performance of Aluminum Metal Etch Wang, Xinpeng ; Zhang, Haiyang ; Shen, Manhua ; Sun, Wu ; Chang, Shih-Mou Abstract Publication: ECS Transactions Pub Date: March 2009 DOI: 10.1149/1.3096514 Bibcode: 2009ECSTr..18a.641W