MBE growth of Ge/Si quantum dots upon low-energy pulsed ion irradiation Stepina, N. ; Dvurechenskii, A. ; Ambrister, V. ; Smagina, J. ; Volodin, V. ; Nenashev, A. ; Leitao, J. ; Docarmo, M. ; Sobolev, N. Abstract Publication: Thin Solid Films Pub Date: November 2008 DOI: 10.1016/j.tsf.2008.08.166 Bibcode: 2008TSF...517..309S