Optical studies of AlN/n-Si(100) films obtained by the method of high-frequency magnetron sputtering Zayats, N. S. ; Boĭko, V. G. ; Gentsar, P. A. ; Litvin, O. S. ; Papusha, V. P. ; Sopinskiĭ, N. V. Abstract Publication: Semiconductors Pub Date: February 2008 DOI: 10.1134/S1063782608020139 Bibcode: 2008Semic..42..195Z