Spectroscopic ellipsometry of materials for infrared micro-device fabrication Folks, W. R. ; Ginn, J. ; Shelton, D. ; Tharp, J. ; Boreman, G. Abstract Publication: Physica Status Solidi C Current Topics Pub Date: May 2008 DOI: 10.1002/pssc.200777748 Bibcode: 2008PSSCR...5.1113F