Effects of Organic Contaminants during Metal Oxide Semiconductor Processes Kim, Kwang-Salk ; Kim, Ja-Young ; Kang, Hee-Bog ; Lee, Bo-Young ; Park, Su-Moon Abstract Publication: Journal of the Electrochemical Society Pub Date: June 2008 DOI: 10.1149/1.2904453 Bibcode: 2008JElS..155H.426K