Ion-Beam Assisted Glancing Angle Deposition for Relative Humidity Sensors Taschuk, Michael T. ; Sorge, Jason B. ; Steele, John J. ; Brett, Michael J. Abstract Publication: IEEE Sensors Journal Pub Date: September 2008 DOI: 10.1109/JSEN.2008.924385 Bibcode: 2008ISenJ...8.1521T