Ultra-Low-Power SiGe HBTs using High-Precision RT-CVD Epitaxial Growth Oda, Katsuya ; Miura, Makoto ; Shimamoto, Hiromi ; Washio, Katsuyoshi Abstract Publication: ECS Transactions Pub Date: October 2008 DOI: 10.1149/1.2986872 Bibcode: 2008ECSTr..16j1089O