Development of a novel EUV mask protection engineering tool and mask handling techniques
Abstract
We have developed a mask protection engineering tool (MPE Tool) that simulates various types of tests during the transfer of a mask or blank in air and in vacuum. We performed mask transfer experiments to investigate particle-free mask handling techniques using the MPE and mask inspection tools. We measured the number of particles accumulated during the transfer of the mask blanks. Less than 0.3 particles were added over a path from a load port (in air) to an ESC chamber (in vacuum) and more than half the particles accumulated appeared during the pumping down and purging steps in the load-lock chamber. Consequently, we consider that pumping down and purging are the most important steps for particle-free mask handling.
- Publication:
-
Photomask and Next-Generation Lithography Mask Technology XIV
- Pub Date:
- May 2007
- DOI:
- 10.1117/12.729035
- Bibcode:
- 2007SPIE.6607E..3GA