Growth of carbon nanotubes by Fe-catalyzed chemical vapor processes on silicon-based substrates
Abstract
In this paper, a site-selective catalytic chemical vapor deposition synthesis of carbon nanotubes on silicon-based substrates has been developed in order to get horizontally oriented nanotubes for field effect transistors and other electronic devices. Properly micro-fabricated silicon oxide and polysilicon structures have been used as substrates. Iron nanoparticles have been obtained both from a thin Fe film evaporated by e-gun and from iron nitrate solutions accurately dispersed on the substrates. Single-walled nanotubes with diameters as small as 1 nm, bridging polysilicon and silicon dioxide “pillars”, have been grown. The morphology and structure of CNTs have been characterized by SEM, AFM and Raman spectroscopy.
- Publication:
-
Physica E Low-Dimensional Systems and Nanostructures
- Pub Date:
- March 2007
- DOI:
- 10.1016/j.physe.2006.07.043
- Bibcode:
- 2007PhyE...37...11A
- Keywords:
-
- 81.07.De;
- 61.46.Fg;
- 73.63.Fg;
- Nanotubes;
- Nanotubes;
- Nanotubes