13.5 nm EUV generation from tin-doped droplets using a fiber laser George, Simi A. ; Hou, Kai-Chung ; Takenoshita, Kazutoshi ; Galvanauskas, Almantas ; Richardson, Martin C. Abstract Publication: Optics Express Pub Date: 2007 DOI: 10.1364/OE.15.016348 Bibcode: 2007OExpr..1516348G