Multi-Probe Atomic Force Microscopy with Optical Beam Deflection Method

We developed a multi-probe atomic force microscope (AFM) having two AFM cantilevers independently controlled using the optical beam deflection method. We succeeded in simultaneously obtaining images with two independent probes by frequency modulation (FM) detection method. To evaluate the distance between the AFM tips of the cantilevers, we used a new the address-patterned sample, which was also developed for this study. The images obtained show that the distance between the probes was 2 μm. The development of the multi-probe AFM opens a wide variety of applications in the present nanoscience and engineering field.